Simulation and Modeling for Nanofabrication
Dr. Hazim El-Mounayri, Mechanical Engineering, Industry/Foundation Funding
Dr. Hazim El-Mounayri, Mechanical Engineering, Industry/Foundation Funding

Tip-based nanofabrication (TBN) is considered a potential manufacturing tool for operations including machining, patterning, and assembling with in situ metrology and visualization. It also has the ability to perform in situ repair/re-manufacturing of the position, size, shape, and orientation of single nanostructures. Some applications of tip-based nanomachining include fabrication of micro/nanodevices, fabrication of metal nanowires, masks for nanolithography, nanowriting, nanochannel and nanopatterning. However, TBN process throughput is currently low due to limited tip removal speed, tip-surface approach, contact detection, desired force profile, and tool wear. A fundamental understanding of substrate deformations, separations and the tip is needed to achieve controllable tip-based nanomachining. Dr. El-Mounayri's group has developed a 3D computational model for tip-based nanomachining using molecular dynamics (MD) [54-62]. The MD model is used to investigate the effect of tip and substrate materials, crystal orientation, indentation depth, tip radius, tip speed, and predict normal and friction forces at tip-substrate interface. Material deformation, machined geometry, and nanoscale material properties including Young's modulus and hardness are also estimated.

In this project, REU students will work on the 3D MD model to simulate TBN process for poly-crystalline materials and will assist in conducting AFM-based TBN experiments to validate the model. In addition, the students will work on extending the current MD model by integrating MD with continuum approach. This will account for the constitutive material behavior in the coupled regions. Students will also be involved in applying the information and data predicted by the modeling and simulation tool to guide the fabrication of nanochannels for practical applications such as nanofluidics.
This project will allow students to develop technical skills in modeling, simulation, programming, nanofabrication, characterization, testing and validation, and critical thinking.
This project will allow students to develop technical skills in modeling, simulation, programming, nanofabrication, characterization, testing and validation, and critical thinking.
References:
R. Promyoo, H. El-Mounayri and K. Varahramyan, "Nanoindentation Models with Realistic AFM Tip Geometries," Proceedings of the ASME 2015 International Manufacturing Science and Engineering Conference, MSEC 2015, Charlotte, North Carolina, USA, June 8-12, 2015.
R. Promyoo, H. El-Mounayri, V. K. Karingula, and K. Varahramyan, "AFM-Based Fabrication of Nanofluidic Device for Medical Applications," TechConnect World 2015 Proceedings, 2015 Nanotech Conference & Expo, Washington D.C., USA, June 14-17, 2015.
R. Promyoo, H. El-Mounayri and K. Varahramyan, "Molecular Dynamics Simulation Model of AFM-based Nanomachining," Proceedings of ICAITA 2014 (Third international conference on Advanced Information Technologies & Applications, UAE, Nov. 07-08, 2014), pp151-168.
R. Promyoo, H. El-Mounayri and K. Varahramyan, "AFM-based Nanoscratching: A 3D Molecular Dynamics simulation with Experimental Verification," Proceedings of the ASME 2014 International Manufacturing Science and Engineering Conference, MSEC 2014, June 9-13, 2014, Detroit, Mi.
R. Promyoo, H. El-Mounayri, K. Varahramyan and V. K. Karingula, "AFM-Based Nanofabrication: Modeling, Simulation, and Experimental Verification," Proceedings of the ASME 2013 International Manufacturing Science and Engineering Conference, MSEC 2013, June 10-14, 2013, Madison, Wisconsin.
R. Promyoo, H. El-Mounayri and K. Varahramyan, "Molecular Dynamics Simulation of AFM-Based Nanoindentation Process: A Comparative Study," Proceedings of the ASME 2012 International Manufacturing Science and Engineering Conference, MSEC 2012, Notre Dame, IN, June 4 - 8, 2012.
R. Promyoo, H. El-Mounayri and K. Varahramyan, "AFM-based Manufacturing for Nano-fabrication Processes: Molecular Dynamics Simulation and AFM Experimental Verification," Proceeding of the second TSME International Conference on Mechanical Engineering, October 19-21, 2011, Thailand.
R. Promyoo, H. El-Mounayri, K. Varahramyan and A. Martini, "Molecular Dynamics Simulation of AFM-based Nanomachining Processes," Proceedings of the ASME 2011 International Manufacturing Science and Engineering Conference, MSEC 2011, Corvallis, Oregon, June 13-17, 2011
R. Promyoo, H. El-Mounayri and A. Martini, "AFM-based Nanomachining for Nano-fabrication Processes: MD simulation and AFM experimental verification" Proceedings of the ASME 2010 International Manufacturing Science and Engineering Conference, MSEC 2010, October 12-15, 2010, Erie, PA.